Sample fabrication

E-beam lithography system Photo-lithography system UHV e-beam evaporator
Sputtering system Thermal evaporator Reactive ion etching system
Sample fabrication
Dilution fridges (made by Prof. Ootuka) Dilution fridge (Oxford) Probing station (room temperature)
Probing station (low temperatures) Lock-ins, amplifiers, and so on He4 cooling system
Sample fabrication
SEM AFMs